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    The fabrication of semiconductor devices primarily encompasses four types of processes: (1) Photolithography (2) Doping Techniques (3) Film Deposition (4) Etching Techniques The specific techniques involved include photolithography, ion implantation, rapid thermal processing (RTP), plasma-enhanced chemical vapor deposition (PECVD), sputtering, and both dry and wet etching methods.

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  • The Study on the Distribution of Electrical Resistivity in n-Type 4H-SiC Crystals

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    The wafer boats, loaded with a batch of wafers to be processed, are positioned on long cantilevered paddles.

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