End Effector for Wafer Handling

Semicorex End Effector for Wafer Handling are dimensionally precise and thermally stable for wafer processing. We have been manufacturer and supplier of silicon carbide coating elements for many years. Our products have a good price advantage and cover most of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

Semicorex End Effector for Wafer Handling are dimensionally precise and thermally stable, while having a smooth, abrasion-resistant CVD SiC coating film to safely handle wafers without damaging devices or producing particulate contamination, which can move semiconductor wafers between positions in wafer processing equipment and carriers precisely and efficiently. Our high-purity silicon carbide (SiC) coating End Effector for Wafer Handling provides superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance.

At Semicorex, we focus on providing high-quality, cost-effective products to our customers. Our End Effector for Wafer Handling has a price advantage and is exported to many European and American markets. We aim to be your long-term partner, delivering consistent quality products and exceptional customer service.

Parameters of End Effector for Wafer Handling

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300