End effector is the robot's hand which moves semiconductor wafers between positions in wafer processing equipment and carriers. End effector must be dimensionally precise and thermally stable, while having a smooth, abrasion-resistant surface to safely handle wafers without damaging devices or producing particulate contamination.
Semicorex high-purity silicon carbide (SiC) coating components provide superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance.