Alumina Chuck

Semicorex Alumina Chuck stands as a cornerstone tool within semiconductor processing, meticulously crafted from alumina ceramics. This specialized material comes in two distinct varieties: high purity and ordinary types, each with its own array of applications and properties.

High-purity alumina ceramics, boasting an Al2O3 content of 99.9% or greater, epitomize excellence in purity and resilience. Formed at sintering temperatures ranging from 1650 to 1990°C, these ceramics possess exceptional light transmission properties within the wavelength range of 1 to 6 μm. Their versatility extends across various industries, from replacing platinum crucibles in molten glass applications to resisting the corrosive forces of alkalis and metals, such as sodium lamps. In the realm of electronics, they find purpose as substrates for integrated circuits and as high-frequency insulation materials.

On the other hand, ordinary alumina ceramics encompass a spectrum of compositions, including 99%, 95%, 90%, and beyond, delineated by their respective Al2O3 content. These ceramics cater to a multitude of needs, with 99 alumina serving in high-temperature crucibles, refractory furnace tubes, and wear-resistant components like ceramic bearings and seals. Meanwhile, the 95 alumina variant excels in corrosion resistance and wear resilience. Some formulations, enriched with talc, exhibit enhanced electrical properties and mechanical strength, facilitating their integration into electric vacuum devices and other specialized applications where sealing with metals like molybdenum, niobium, and tantalum is imperative.

The Alumina Chuck, embodying the robustness and versatility of alumina ceramics, emerges as a vital fixture in semiconductor manufacturing. Its precision engineering and resilience against extreme conditions make the Alumina Chuck indispensable for securing delicate semiconductor wafers during critical processing stages, ensuring the integrity and quality of the final products.