What is cantilever paddles?

During semiconductor wafer processing, specialized furnaces are used to heat the wafers. These furnaces contain elongated cylindrical tubes where the wafers are placed on wafer boats at predetermined and equidistant positions. To ensure that the processing equipment doesn't waste the wafers and to withstand the processing conditions within the chamber, wafer boats and other devices used in wafer processing are fabricated from materials like silicon carbide (SiC).

The wafer boats, loaded with a batch of wafers to be processed, are positioned on long cantilevered paddles. These paddles can be inserted into and withdrawn from the tubular furnaces and reactors. The paddles consist of a flattened carrier section which can hold one or more boats and a long handle located at one end of the flattened carrier section for easy handling.

For the best components in semiconductor processing, it is recommended to use a cantilever paddle made from recrystallized silicon carbide with a CVD SiC thin layer. This material is of high purity and is the best choice for such components.

Semicorex fabricate customized cantilever paddles with high-quality CVD SiC coating. If you have any inquiries or need additional details, please don't hesitate to get in touch with us.

Contact phone # +86-13567891907

Email: sales@semicorex.com