CVD SiC Coated Graphite Pancake Susceptor

Semicorex provides high-quality CVD SiC coated graphite pancake susceptor. We have been manufacturer and supplier of graphite materials for many years. Our CVD SiC coated graphite pancake susceptor has a good price advantage and cover most of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

Semicorex CVD SiC (Chemical Vapor Deposition Silicon Carbide) coated graphite pancake susceptor is an advanced version of the graphite pancake susceptor discussed earlier. It incorporates a thin layer of SiC coating applied using the CVD process onto the surface of the graphite susceptor.

The CVD SiC coated graphite pancake susceptor is widely used in semiconductor processing, such as wafer epitaxial, ICP etching, RTP process, and etc.