EPI 3 1/4" Barrel Susceptor

Semicorex SiC coating EPI 3 1/4" Barrel Susceptor provides excellent thermal stability and resistance to chemical attack, while the graphite substrate offers superior heat transfer properties.

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Product Description

Semicorex EPI 3 1/4" barrel susceptor is a high-quality graphite product coated with high-purity SiC, offering exceptional heat and corrosion resistance. It is specifically designed for LPE applications in the semiconductor manufacturing industry.

Our EPI 3 1/4" Barrel Susceptors are designed for use in a variety of industries, including aerospace, automotive, and electronics. We are committed to providing high-quality products at a competitive price, and we are dedicated to building long-term relationships with our customers. Contact us today to learn more about our SiC-coated graphite crucibles and how they can benefit your business.

Parameters of EPI 3 1/4" Barrel Susceptor

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300