Silicon Annealing Boat

Ultra-High Purity for Pristine Processing Environments: Semicorex Silicon Annealing Boat, crafted from ultra-high purity silicon (up to 13N purity), minimize the risk of contamination during high-temperature processing. This exceptional purity ensures that the wafers are exposed to a pristine environment, preventing the introduction of unwanted impurities that can degrade device performance and reduce yield.

Reduced Wafer Contact for Minimized Damage: The smooth, polished surface of the Silicon Annealing Boat minimize contact points with the wafers, significantly reducing the risk of scratching, chipping, or other mechanical damage during transport and processing. This careful handling preserves the integrity of the wafers, improving overall process yield and contributing to higher-quality devices.

Customizable Designs for Optimized Performance: The Silicon Annealing Boat designs can be tailored to meet specific process requirements, including variations in boat shape, length, angle, and the number of wafer support teeth. This customization enables optimization of gas flow dynamics, temperature uniformity, and wafer spacing within the furnace, ensuring consistent and repeatable processing results for a wide range of device geometries and process parameters.

High Polysilicon Deposition Limit for Extended Operation: The Silicon Annealing Boat presents a high tolerance for polysilicon deposition, allowing for extended operation before cleaning or replacement is required. This extended lifespan reduces equipment downtime associated with maintenance, contributing to increased production capacity and lower overall manufacturing costs.