SiC Ceramic Wafer Boat

Semicorex SiC Ceramic Wafer Boat distinguishes themselves through a unique combination of material properties that make it ideally suited for the rigors of semiconductor and photovoltaic manufacturing:

Unwavering High-Temperature Stability: Wafer processing often involves extreme temperatures that push conventional materials to their limits. The SiC Ceramic Wafer Boat exhibits exceptional high-temperature resistance, maintaining its structural integrity and mechanical properties even at temperatures exceeding 1650°C (3000°F). This enables their use in critical processes like diffusion and  annealing, where precise temperature control and wafer stability are paramount.

Impregnable Fortress Against Corrosion: The harsh chemicals and aggressive substances used in semiconductor and photovoltaic fabrication pose a significant challenge to material integrity. The SiC Ceramic Wafer Boat exhibits superior corrosion resistance compared to most metals and other ceramics, withstanding prolonged exposure to a wide range of acids, solvents, salts, and organic compounds. This inertness ensures the boat’s longevity, prevents contamination from material degradation, and safeguards the purity of critical process steps.

Effortless Cleanliness for Uncompromising Purity: Maintaining pristine wafer surfaces is paramount for achieving high device yields and performance. The SiC Ceramic Wafer Boat’s non-porous surface and resistance to chemical attack make it exceptionally easy to clean. Contaminants are readily removed, preventing cross-contamination between process runs and ensuring the pristine environment required for high-performance semiconductor and photovoltaic devices.

Resilience Against Thermal and Mechanical Stress: Wafer processing often involves rapid temperature changes and mechanical handling that can induce stress and damage susceptible materials. The SiC Ceramic Wafer Boat’s robust mechanical properties, including high hardness and exceptional thermal shock resistance, ensure its structural integrity even under demanding conditions. This minimizes the risk of particle generation or wafer damage, contributing to higher yields and consistent product quality.

Slip-Free Transport for Unwavering Precision: Precise wafer handling is crucial for preventing damage and ensuring consistent processing. The SiC Ceramic Wafer Boat’s inherent lubricity and low coefficient of friction create a naturally slip-free surface. This allows for smooth, controlled wafer movement during loading and unloading, minimizing the risk of scratching, chipping, or other damage that could compromise wafer integrity.