Solar Graphite Boat

Semicorex Solar Graphite Boat serves as a reliable platform for holding semiconductor wafers during various thermal processes, such as annealing, diffusion, and deposition. Its robust construction and exceptional heat resistance make Solar Graphite Boat an indispensable tool for semiconductor manufacturing, research laboratories, and other advanced industrial applications.

Designed with versatility in mind, the Solar Graphite Boat can be customized to meet specific customer requirements. Whether coated with silicon carbide (SiC) for enhanced durability and resistance to chemical corrosion, or left uncoated for applications where purity is paramount, each Solar Graphite Boat is meticulously crafted to deliver consistent performance and longevity.

Key features of the Solar Graphite Boat include:

Exceptional Thermal Stability: Withstand extreme temperatures encountered in semiconductor processing, ensuring uniform heat distribution and precise control over thermal cycles.

High Purity Graphite Construction: Manufactured from premium graphite materials to minimize contamination and maintain the integrity of semiconductor wafers.

Precision Engineering: Designed to accommodate various wafer sizes and configurations, with precise dimensions and surface finishes to ensure secure handling and minimal wafer damage.

TaC Coated Graphite Parts play a pivotal role in optimizing key semiconductor processing techniques, including diffusion processes, oxidation annealing, Low Pressure Chemical Vapor Deposition (LPCVD), and Plasma-Enhanced Chemical Vapor Deposition (PECVD). By facilitating precise control over temperature and ensuring uniformity across substrates, TaC Coated Graphite Parts contribute significantly to improving product quality and manufacturing efficiency.

Semicorex TaC Coated Graphite Parts are meticulously engineered to meet the stringent demands of semiconductor manufacturing. From enhancing diffusion processes to improving the quality and efficiency of various deposition techniques, TaC Coated Graphite Parts are indispensable assets in the pursuit of excellence in semiconductor fabrication.