Planetary Disk

Semicorex Planetary Disk, silicon carbide coated graphite wafer susceptor or carrier designed for Molecular Beam Epitaxy (MBE) processes within Metal-Organic Chemical Vapor Deposition (MOCVD) furnaces. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

Send Inquiry

Product Description

Planetary Disk a revolutionary wafer carrier and susceptor designed for Molecular Beam Epitaxy (MBE) processes within Metal-Organic Chemical Vapor Deposition (MOCVD) furnaces. Crafted from high-quality materials, the Planetary Disk is engineered to elevate your semiconductor manufacturing to new heights.

The Planetary Disk is meticulously crafted from CVD SiC coated graphite, ensuring exceptional thermal stability, high purity, and resistance to extreme temperatures. This advanced material composition guarantees superior performance and longevity in demanding MOCVD environments.

The CVD SiC coating on the graphite substrate enhances thermal conductivity, promoting efficient heat transfer during the MOCVD process. This feature not only ensures consistent temperature profiles across the wafer but also contributes to reduced thermal stress and improved overall yield.

The Planetary Disk is customized, which is compatible with a wide range of semiconductor wafer sizes, making it a versatile solution for various production requirements. Built to withstand the rigorous demands of MOCVD furnaces, the Planetary Disk exhibits exceptional durability and reliability. Its robust construction ensures long-lasting performance, reducing downtime and maintenance costs associated with wafer carriers and susceptors.