6 inch SiC Boat

Semicorex 6 Inch SiC Boat is an advanced wafer carrier designed to optimize the performance and efficiency of high-temperature semiconductor processing, specifically for applications such as oxidation, diffusion, and other thermal processes. Made from high-quality silicon carbide (SiC), this product offers a robust solution for holding semiconductor wafers during critical high-temperature operations, providing superior thermal stability, excellent corrosion resistance, and minimal contamination risks.

The 6 Inch SiC Boat is manufactured using high-purity silicon carbide (SiC), a material known for its outstanding thermal properties, chemical resistance, and durability in harsh environments. SiC is widely used in semiconductor manufacturing because of its high melting point (approximately 2,700°C), making it ideal for high-temperature applications such as wafer processing in oxidation and diffusion furnaces. The boat's design ensures excellent structural integrity and uniform heat distribution, which are crucial for achieving consistent results in semiconductor crystal growth, oxidation, and other thermal treatments.

Key Features and Benefits

High Thermal Stability

SiC’s exceptional thermal conductivity ensures that the 6 Inch SiC Boat can withstand extreme temperatures without warping or degrading. This property is especially valuable during oxidation and diffusion processes, where precise temperature control is essential for consistent wafer processing.

Excellent Chemical Resistance

Silicon carbide’s inherent resistance to chemical corrosion makes the boat ideal for use in environments where exposure to aggressive gases, such as oxygen, nitrogen, or other reactive elements, is common. The boat maintains its structural integrity and performance in high-temperature, chemically reactive environments, reducing the likelihood of contamination.

High-Temperature Durability

The 6 Inch SiC Boat is engineered to perform in temperatures up to 1,500°C, a requirement for many high-temperature semiconductor processes, including oxidation and diffusion. This high-temperature tolerance ensures a long service life even in demanding applications.

Low Contamination Risk

One of the critical factors in semiconductor processing is minimizing contamination of the wafer surface. SiC’s low impurity levels and non-reactive nature ensure that the 6 Inch SiC Boat contributes to a clean and controlled environment, thereby reducing the risk of unwanted contamination during processing.

Uniform Wafer Support

The design of the boat ensures that wafers are supported evenly, maintaining optimal wafer alignment and preventing any sagging or misalignment during high-temperature processing. This uniform support is essential for ensuring consistent results and preventing wafer defects.

Customization Options

The 6 Inch SiC Boat can be customized to fit specific customer requirements, including tailored sizes, shapes, and configurations for different wafer types. Whether used for oxidation, diffusion, or other thermal processes, the boat can be optimized for the customer’s particular process flow.

Applications in Semiconductor Manufacturing

The 6 Inch SiC Boat is primarily used in high-temperature thermal processes in semiconductor manufacturing. It is especially effective in oxidation and diffusion furnaces, where precise control of temperature and atmosphere is required for successful wafer processing.

• Oxidation Process: During the oxidation process, silicon wafers are exposed to oxygen at elevated temperatures to form a thin silicon dioxide layer on the wafer surface. The 6 Inch SiC Boat ensures that the wafers are held securely and evenly during this high-temperature process, preventing deformation or misalignment and ensuring uniform oxide layer growth.
• Diffusion Process: In the diffusion process, dopants are introduced into the silicon wafer to modify its electrical properties. The SiC Boat provides stable and reliable support for the wafers during this critical step, where high temperatures and precise control of the diffusion environment are paramount. Its excellent thermal stability ensures uniform heating, which is crucial for achieving the desired dopant profile.
• Other High-Temperature Applications: Beyond oxidation and diffusion, the 6 Inch SiC Boat can be utilized in other high-temperature processes, such as annealing, nitridation, and epitaxial growth. Its high thermal conductivity and resistance to thermal shock make it a versatile solution for various stages of semiconductor device fabrication.

Advantages Over Other Materials

Compared to traditional materials such as quartz or graphite, silicon carbide offers significant advantages in semiconductor manufacturing. Quartz boats are more susceptible to thermal shock and chemical reactions, while graphite boats can outgas and introduce contamination. SiC boats, on the other hand, maintain their performance in harsh environments without the risks of contamination, thermal instability, or degradation. This makes the 6 Inch SiC Boat a more reliable and efficient choice for high-temperature semiconductor processing.

Semicorex 6 Inch SiC Boat is a critical component in the semiconductor industry, providing the necessary stability, chemical resistance, and thermal performance required for advanced wafer processing. Its high thermal conductivity, resistance to chemical corrosion, and minimal contamination risk make it the ideal choice for oxidation, diffusion, and other high-temperature semiconductor processes. Whether used in research and development or large-scale production, the 6 Inch SiC Boat delivers the performance and reliability needed to ensure the highest quality results in semiconductor manufacturing.