Wafer Boat Carrier

Semicorex Wafer Boat Carrier is made of graphite, which is known for its exceptional strength-to-weight ratio and thermal conductivity. However, to enhance its durability, each vessel undergoes a CVD SiC coating process. This coating not only strengthens the boat against harsh processing environments but also protects it from chemical corrosion and thermal shocks, ensuring longevity and reliability even in the most demanding conditions.

The Wafer Boat Carrier is designed with meticulous attention to detail. Its structure is optimized for maximum efficiency and safety, with precise dimensions and carefully engineered geometries that ensure the secure and stable placement of delicate semiconductor wafers during processing. This minimizes the risk of damage or contamination.

The Wafer Boat Carrier is a versatile solution adaptable to a myriad of applications. It can be used in epitaxial growth, chemical vapor deposition, and other semiconductor manufacturing processes. Its robust construction and chemical inertness make it compatible with a wide range of process chemistries, ensuring seamless integration into diverse processing environments.