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SiC Boat for Wafer Handling

SiC Boat for Wafer Handling

Crafted from a silicon carbide of exceptional purity, the Semicorex SiC Boat for Wafer Handling boasts a construction that includes precision slots to secure the wafers, mitigating any movement during operational procedures. The choice of silicon carbide as the material ensures not only hardness and resilience but also the capability to endure elevated temperatures and exposure to chemicals. This makes the SiC Boat for Wafer Handling a pivotal component in a multitude of semiconductor production stages, such as the cultivation of crystals, diffusion, ion implantation, and etching processes.

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Product Description

Distinguished by its unparalleled ratio of strength to weight and superior thermal conductive properties, the Semicorex SiC Boat for Wafer Handling undergoes a further enhancement process through a CVD SiC coating. This additional coating layer amplifies its resistance to the rigors of processing environments and shields it from both chemical degradation and thermal fluctuations, significantly extending its operational lifespan and ensuring consistent performance under stringent operational demands.


In thermal operations like annealing or diffusion, the SiC Boat for Wafer Handling is instrumental in achieving an even temperature distribution on the wafer’s surface. Its excellent thermal conductivity facilitates effective heat dispersion, reducing thermal disparities and promoting uniformity in process outcomes.


The Semicorex SiC Boat for Wafer Handling is esteemed for its reliability and outstanding performance, fulfilling the rigorous requirements of contemporary semiconductor production. With its adaptability for both batch and individual wafer processes, the SiC Boat for Wafer Handling stands as an essential tool for semiconductor production facilities dedicated to achieving superior product standards and maximized yields.The SiC Boat for Wafer Handling ’s role is critical in upholding both the integrity and dependability of the wafers, finding extensive application across semiconductor production equipment, industrial devices, and as replacement parts.



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