SiC Axle Sleeve

Semicorex provides semiconductor-grade ceramics for your OEM semi fabrication tools and wafer handling components. We have been manufacturer and supplier of silicon carbide coating film for many years. Our SiC Axle Sleeve has a good price advantage and cover most of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

Our SiC Axle Sleeve have good resistance to corrosion and excellent resistance to high temperatures and thermal shock. A high modulus of elasticity furthermore results in excellent dimensional stability. Additionally, there is the zero porosity and low pore density of the ceramic material.

We can process all kinds of SiC Axle Sleeve to customers’requirements.

Parameters of SiC Axle Sleeve

Technical Properties
Index	Unit	Value
Material Name		Reaction Sintered Silicon Carbide	Pressureless Sintered Silicon Carbide	Recrystallized Silicon Carbide
Composition		RBSiC	SSiC	R-SiC
Bulk Density	g/cm3	3	3.15 ± 0.03	2.60-2.70
Flexural Strength	MPa (kpsi)	338(49)	380(55)	80-90 (20°C) 90-100(1400°C)
Compressive Strength	MPa (kpsi)	1120(158)	3970(560)	> 600
Hardness	Knoop	2700	2800	/
Breaking Tenacity	MPa m1/2	4.5	4	/
Thermal Conductivity	W/m.k	95	120	23
Coefficient of Thermal Expansion	10^-6.1/°C	5	4	4.7
Specific Heat	Joule/g 0k	0.8	0.67	/
Max temperature in air	℃	1200	1500	1600
Elastic Modulus	Gpa	360	410	240

Semicorex produced SiC Axle Sleeve in three forms, Reaction sintered silicon carbide(RBSiC), Pressureless sintered silicon carbide(SSiC) and Recrystal silicon carbide(R-SiC).

The difference between SSiC and RBSiC:

1. Sintering process is different. RBSiC is to infiltrate free Si into silicon carbide at a low temperature, SSiC is formed by natural shrinkage at 2100 degrees.

2. SSiC have smoother surface, higher density and higher strength, for some sealings with more strict surface requirements, SSiC will be better.

3. Different used time under different PH and temperature, SSiC is longer than RBSiC

Features of SiC Axle Sleeve

- High strength (Mohs hardness 9.5, second only to diamond)

- Corrosion resistance to acids, alkalis, salts and organic solvents

- High thermal conductivity, plasma resistance, long life

- Semiconductors

Available shapes of silicon carbide ceramics：

● Ceramic rod / ceramic pin / ceramic plunger

● Ceramic tube / ceramic bushing / ceramic sleeve

● Ceramic ring / ceramic washer / ceramic spacer

● Ceramic disc