Robot End Effector

Semicorex is a leading independently owned manufacturer of Silicon Carbide Coated Graphite, Precision Machined High Purity Graphite focusing on the Silicon Carbide Coated Graphite, Silicon Carbide Ceramic, MOCVP areas of semiconductor manufacturing. Our Robot End Effector has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

Robot End Effector is the robot's hand which move semiconductor wafers between positions in wafer processing equipment and carriers. Robot End Effector must be dimensionally precise and thermally stable, while having a smooth, abrasion-resistant surface to safely handle wafers without damaging devices or producing particulate contamination. Our high-purity silicon carbide (SiC) coating Robot End Effector provides superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance.

Parameters of Robot End Effector

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300