Quartz Tank for Wet Processing

The Quartz Tank for Wet Processing, crafted from semiconductor grade quartz, offers exceptional durability and non-reactivity to a variety of chemistries including sulfuric acid (H2SO4), hydrogen peroxide (H2O2), and standard clean solutions (SC1).

One of the primary applications of the Quartz Tank for Wet Processing in wafer fabrication is the cleaning of wafers. During various fabrication steps, wafers may be masked to etch specific parts or to confine diffusion to designated areas. Once a particular process step is complete, the masking material must be thoroughly cleaned off to prepare the wafer for the next step. The Quartz Tank for Wet Processing play a crucial role in this cleaning process, ensuring that the wafers are cleaned effectively without leaving any residues or particles that could contaminate subsequent processing steps.

The ability of Quartz the Tank for Wet Processing to resist aggressive chemicals is paramount in wet processing applications. These tanks are designed to withstand the harsh chemicals used in etching and cleaning processes without reacting with them. This non-reactivity ensures that the chemicals remain effective and that no unwanted chemical reactions occur that could compromise the integrity of the wafers.

In wafer cleaning processes, it is essential to minimize contamination of the wafers with particles. Semicorex Quartz Tank for Wet Processing is engineered to reduce the risk of contamination, ensuring that the wafers are cleaned thoroughly and efficiently. Our quartz tanks can be supplied in heated and re-circulating models, which allow for precise temperature control and continuous circulation of cleaning solutions.

Another critical feature of Semicorex Quartz Tank for Wet Processing is the high thermal resistance. These tanks can operate at temperatures up to 190°C, suitable for processes that involve heating of the cleaning or etching solutions. High thermal resistance ensures that the tanks maintain their structural integrity and performance even under elevated temperatures. This is particularly important in processes where temperature control is crucial for achieving the desired results.

The Quartz Tank for Wet Processing also exhibit low thermal expansion and high resistance to thermal shocks. Low thermal expansion minimizes the risk of cracking or deformation due to temperature fluctuations, ensuring the longevity and reliability of the tanks. High resistance to thermal shocks allows the quartz tanks to withstand rapid temperature changes without compromising their structural integrity. These thermal properties are essential for maintaining the precision and reliability of wet processing steps in wafer fabrication.

High transparency is another advantage of Semicorex Quartz Tank for Wet Processing. The transparency of the quartz material allows for visual inspection of the wafers and the cleaning or etching solutions during processing. This visibility enhances process control and monitoring, ensuring that any issues can be detected and addressed promptly. The ability to visually monitor the process is particularly important for ensuring the quality and consistency of the wafer cleaning and etching steps.

At Semicorex, we employ advanced machining technology to produce high-quality Quartz Tank for Wet Processing. Our manufacturing capabilities include diamond blade and laser cutting to size, ensuring precise dimensions and high-quality finishes. We also utilize highly polished surfaces to minimize the risk of particle generation and contamination. Our experienced quartz welders and machinists create high-purity quartz tanks with high-strength welded inlets and probe holders, customized to meet the specific needs of our customers.

To enhance the performance and durability of the Quartz Tank for Wet Processing, we anneal them to relieve thermal stress. Annealing is a heat treatment process that reduces internal stresses within the quartz material, improving its resistance to thermal shock and enhancing its overall durability.

Custom sizes and configurations are essential to meet the diverse requirements of semiconductor manufacturing processes. At Semicorex, we offer a wide range of custom sizes and configurations for our quartz tanks, allowing us to provide solutions tailored to the specific needs of our customers. Whether it’s adding high-strength welded quartz inlets, probe holders, or other custom features, we work closely with our clients to deliver quartz tanks that meet their precise specifications.