TaC Coated Susceptor

Semicorex TaC Coated Susceptor, made from a graphite base material, is coated with tantalum carbide (TaC) to enhance its performance and durability.

Tantalum carbide offers exceptional thermal stability, enabling the TaC Coated Susceptor to withstand extremely high temperatures often encountered in processes such as chemical vapor deposition (CVD) and physical vapor deposition (PVD). And TaC coating provides superior resistance to chemical reactions, oxidation, and corrosion, which is crucial for maintaining integrity and performance in harsh chemical environments.

The uniform and stable thermal properties of TaC Coated Susceptor improve the consistency and quality of the processes they are used in, leading to better yield and efficiency in semiconductor manufacturing.

Meanwhile the use of TaC of the TaC Coated Susceptor minimizes the risk of contamination in semiconductor processes, which is critical for producing high-purity and defect-free electronic components.

Applications of TaC Coated Susceptor:

Semiconductor Manufacturing: Utilized in CVD and PVD processes to deposit thin films and epitaxial layers on semiconductor wafers.

LED Production: Employed in the production of light-emitting diodes (LEDs) where precise and stable thermal conditions are required.

Solar Cell Fabrication: Used in the manufacture of photovoltaic cells to enhance efficiency and reliability.

Semicorex TaC Coated Susceptor are critical in advanced manufacturing processes where high thermal stability, chemical resistance, and durability are required. Their application ensures improved performance, longevity, and product quality in high-tech industries.