Silicon carbide ceramic (SiC) is an advanced ceramic material containing silicon and carbon. Grains of silicon carbide can be bonded together by sintering to form very hard ceramics. Semicorex supplies custom silicon carbide ceramics as your requiring.
Applications
With silicon carbide ceramics the material properties remain constant up to temperatures above 1,400°C. The high Young’s modulus > 400 GPa ensures excellent dimensional stability.
A typical application for silicon carbide components is dynamic sealing technology using friction bearings and mechanical seals, for instance in pumps and drive systems.
With the advanced properties, silicon carbide ceramics are also ideal for use in the semiconductor industry.
Wafer Boats →
Semicorex Wafer Boat is made of sintered silicon carbide ceramic, which has good resistance to corrosion and excellent resistance to high temperatures and thermal shock. Advanced ceramics deliver excellent thermal resistance and plasma durability while mitigating particles and contaminants for high-capacity wafer carriers.
Reaction sintered silicon carbide
Compared with other sintering processes, the size change of reaction sintering during the densification process is small, and products with precise dimensions can be produced. However, the presence of a large amount of SiC in the sintered body makes the high temperature performance of reaction sintered SiC ceramics worse.
Pressureless sintered silicon carbide
Pressureless sintered silicon carbide (SSiC) is a particularly light and at the same time hard high-performance ceramic. SSiC is characterized by high strength, which remains almost constant even at extreme temperatures.
Recrystal silicon carbide
Recrystallized silicon carbide(RSiC) are next generation materials formed by mixing high-purity silicon carbide coarse powder and high-activity silicon carbide fine powder, and after grouting, vacuum sintering at 2450 ° C to recrystallize.
Perfect for next-generation lithography and wafer-handling applications, Semicorex ultra-pure ceramic components ensure minimal contamination and provide exceptionally long life performance. Our Wafer Vacuum Chuck has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.
Read MoreSend InquirySemicorex durable focus rings for semiconductor processing are designed to withstand the extreme environments of plasma etch chambers used in semiconductor processing. Our focus rings are made of high-purity graphite coated with a dense, wear-resistant silicon carbide (SiC) coating. The SiC coating has high corrosion and heat resistance properties, as well as excellent thermal conductivity. We apply SiC in thin layers onto the graphite using the chemical vapor deposition (CVD) process to improve the service life of our focus rings.
Read MoreSend InquirySemicorex Plasma processing focus ring is specially designed to meet the high demands of plasma etch processing in the semiconductor industry. Our advanced, high-purity Silicon Carbide Coated Components are built to withstand extreme environments and are suitable for use in various applications, including silicon carbide layers and epitaxy semiconductors.
Read MoreSend InquirySemicorex advanced, high-purity SiC Focus Rings are built to withstand the extreme environments in plasma etch (or dry etch) chambers. We focus on semiconductor industries such as silicon carbide layers and epitaxy semiconductor. Our products have a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.
Read MoreSend InquirySemicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated Graphite in China. Our MOCVD Inlet Seal Ring has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.
Read MoreSend InquirySemicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated Graphite in China. Our MOCVD Inlet Rings have a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.
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