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China Ceramic Manufacturers, Suppliers, Factory

Semicorex is your partner for improving in semiconductor processing. Our silicon carbide coatings are dense, high temperature and chemical resistant, which are often used in the whole cycle of semiconductor manufacturing, including semiconductor wafer & wafer processing and semiconductor fabrication.

High-purity SiC ceramic components are crucial to processes in the semiconductor. Our offering ranges from consumables parts for wafer processing equipment, such as Silicon Carbide wafer boat, cantilever paddles, tubes, etc for Epitaxy or MOCVD.


Advantages for semiconductor processes

The thin film deposition phases such as epitaxy or MOCVD, or wafer handling processing such as etching or ion implant must endure high temperatures and harsh chemical cleaning. Semicorex supplies high-purity silicon carbide (SiC) construction provides superior heat resistance and durable chemical resistance, even thermal uniformity for consistent epi layer thickness and resistance.


Chamber Lids →
Chamber Lids used in crystal growth and wafer handling processing must endure high temperatures and harsh chemical cleaning.


Cantilever Paddle →
Cantilever Paddle is a crucial component used in semiconductor manufacturing processes, particularly in diffusion or LPCVD furnaces during processes like diffusion and RTP.


Process Tube →
Process Tube is a crucial component, specifically designed in various semiconductor processing applications such as RTP, diffusion.


Wafer Boats →
Wafer Boat is used in semiconductor processing, it has been meticulously designed to ensure the delicate wafers are kept safe during the critical stages of production.


Inlet Rings →
SiC coated gas inlet ring by MOCVD equipment Compound growth has high heat and corrosion resistance, which has great stability in extreme environment.


Focus Ring →
Semicorex supplies Silicon Carbide Coated focus ring is really stable for RTA, RTP or harsh chemical cleaning.


Wafer Chuck →
Semicorex ultra-flat ceramic vacuum wafer chucks is high purity SiC coated using in the wafer handling process.


Semicorex also have ceramic products in Alumina (Al2O3), Silicon Nitride (Si3N4), Aluminum Nitride (AIN), Zirconia (ZrO2), Composite Ceramic, etc.


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Pyrolytic Boron Nitride Heaters

Pyrolytic Boron Nitride Heaters

Semicorex Pyrolytic Boron Nitride Heaters represent the pinnacle of performance and reliability in the realm of high-temperature applications. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

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PBN Heaters

PBN Heaters

Semicorex PBN Heaters boast a sophisticated triple-layered design engineered to redefine performance benchmarks. At its core lies a foundation crafted from high-purity pyrolytic boron nitride (PBN), renowned for its exceptional thermal conductivity and robust structural integrity. we look forward to becoming your long-term partner in China.

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Wafer Boat Carrier

Wafer Boat Carrier

Semicorex Wafer Boat Carrier stands as a pinnacle of innovation in the realm of semiconductor processing. Crafted meticulously from graphite and fortified with a cutting-edge coating of Chemical Vapor Deposition (CVD) Silicon Carbide (SiC), this carrier exemplifies precision engineering and advanced materials science. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

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Baffle Wafer Boat

Baffle Wafer Boat

Semicorex Baffle Wafer Boat is a highly advanced piece of equipment used in semiconductor processing. It has been meticulously designed to ensure the delicate wafers are kept safe during the critical stages of production. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

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SiC Vacuum Chuck

SiC Vacuum Chuck

Semicorex SiC Vacuum Chuck represents a pinnacle of precision engineering tailored for the demanding semiconductor industry. Crafted from graphite substrates and enhanced through state-of-the-art Chemical Vapor Deposition (CVD) techniques, this innovative device seamlessly integrates the unparalleled properties of Silicon Carbide (SiC) coating. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

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SiC Wafer Chuck

SiC Wafer Chuck

Semicorex SiC Wafer Chuck stands as a pinnacle of innovation in semiconductor manufacturing, serving as a crucial component in the intricate process of semiconductor fabrication. Crafted with meticulous precision and cutting-edge technology, this chuck plays an indispensable role in supporting and stabilizing silicon carbide (SiC) wafers during various stages of production. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

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Semicorex has been producing Ceramic for many years and is one of the professional Ceramic manufacturers and Suppliers in China. Once you buy our advanced and durable products which supply bulk packing, we guarantee the large quantity in quick delivery. Over the years, we have provided customers with customized service. Customers are satisfied with our products and excellent service. We sincerely look forward to becoming your reliable long-term business partner! Welcome to buy products from our factory.
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