SiC Coated Epitaxy Disc

There are extensive properties of Semicorex SiC Coated Epitaxy Disc that make it an indispensable component in semiconductor manufacturing, where the precision, durability, and robustness of equipment are paramount for the success of high-tech semiconductor devices. We at Semicorex are dedicated to manufacturing and supplying high-performance SiC Coated Epitaxy Disc that fuse quality with cost-efficiency.**

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Product Description

Semicorex SiC Coated Epitaxy Disc features a range of unparalleled advantages within the semiconductor industry, which can be further elaborated as follows:

Low Coefficient of Thermal Expansion: The SiC Coated Epitaxy Disc boasts a notably low coefficient of thermal expansion, which is critical in semiconductor processing where dimensional stability is essential. This attribute ensures that the SiC Coated Epitaxy Disc undergoes minimal expansion or contraction under temperature variations, maintaining the integrity of the semiconductor structure during high-temperature processes.

High-Temperature Oxidation Resistance: Engineered with remarkable oxidation resistance, this SiC Coated Epitaxy Disc retains its structural integrity at elevated temperatures, making it an ideal component for applications within high-temperature semiconductor processes where thermal stability is crucial.

Dense and Fine-Porous Surface: The surface of the SiC Coated Epitaxy Disc is characterized by its density and fine porosity, which provides an optimal surface texture for adhering various coatings and ensures effective material removal during semiconductor wafer processing without damaging the delicate surface.

High Hardness: The coating imparts a high level of hardness to the graphite disc, which is resistant to scratching and wear, thus extending the service life of the SiC Coated Epitaxy Disc and reducing the frequency of replacement in semiconductor manufacturing environments.

Resistance to Acids, Bases, Salts, and Organic Reagents: The SiC Coated Epitaxy Disc’s CVD SiC coating offers excellent resistance to a wide range of corrosive agents, including acids, bases, salts, and organic reagents, making it suitable for use in environments where chemical exposure is a concern, thereby enhancing the reliability and longevity of the equipment.

Beta-SiC Surface Layer: The SIC (Silicon Carbide) surface layer of the SiC Coated Epitaxy Disc consists of beta-SiC, which has a face-centered cubic (FCC) crystal structure. This crystal structure contributes to the coating’s exceptional mechanical and thermal properties, offering superior strength and thermal conductivity to the disc, which is essential for semiconductor processing equipment.