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Plate for Epitaxial Growth

Plate for Epitaxial Growth

The Semicorex Plate for Epitaxial Growth stands as a critical element specifically designed to cater to the intricacies of epitaxial processes. Customizable to meet distinct specifications and preferences, our offering delivers an individually tailored solution that seamlessly fits your unique operational needs. We offer a range of customization options, from size alterations to variations in the coating application, equipping us to engineer and supply a product capable of enhancing performance across various application scenarios. We at Semicorex are dedicated to manufacturing and supplying high-performance Plates for Epitaxial Growth that fuse quality with cost-efficiency.

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Product Description

The Semicorex Plate for Epitaxial Growth, Engineered for the precise task of supporting semiconductor wafers during epitaxial layer formation, is indispensable within Metal-Organic Chemical Vapor Deposition (MOCVD) systems. Its strategic role is to facilitate the even and controlled expansion of epitaxial films, ensuring consistent quality across the wafer surface.


1. Crafted with durability in mind, the Plate for Epitaxial Growth provides a steadfast platform that reduces the likelihood of wafer movement or damage, thus protecting the integrity of the wafers during the sensitive phases of epitaxial film development. The Plate for Epitaxial Growth acts not only as a support but also as a shield for the underlying graphite from the aggressive chemical reactions and wear that may occur during epitaxy.


2. The incorporation of a SiC coating on the Plate for Epitaxial Growth significantly improves its thermal properties, enabling rapid and balanced heat dispersal that is essential for uniform epitaxial layer formation. The Plate for Epitaxial Growth’s ability to uniformly absorb and emit heat ensures a thermally stable environment conducive to the precise deposition of thin films—an essential factor in producing epitaxial layers of superior quality, upon which the efficacy and reliability of advanced semiconductors hinge.


3. Featuring a coating of fine SiC crystals, the Plate for Epitaxial Growth offers a flawlessly smooth surface that is crucial for the delicate handling of wafers. This pristine interface minimizes any potential surface contamination as wafers make extensive contact across the Plate for Epitaxial Growth throughout the process.


In summation, leveraging the Semicorex Plate for Epitaxial Growth promises steadfast performance and an extended service life, curtailing the frequency of replacement needs. The Plate for Epitaxial Growth elevates the caliber of output significantly, thus reducing both operational downtime and maintenance costs while concurrently boosting production efficiency.**



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