Glass-like Carbon Coated Rigid Felt

One of the primary advantages of the Glass-like Carbon Coated Rigid Felt is its exceptional thermal resistance. The glass-like carbon coating enables the material to endure temperatures up to 2000°C in an inert atmosphere, making it ideally suited for high-temperature semiconductor processes. This capability is complemented by the coating’s low thermal expansion and high thermal shock resistance, which protect the carbon fiber rigid felt substrate from damage during rapid temperature fluctuations. These properties are crucial in semiconductor manufacturing, where consistent thermal management is essential for maintaining the integrity of sensitive components.

The glass-like carbon coating also imparts remarkable chemical and corrosion resistance to the carbon fiber rigid felt. This resistance ensures that the material remains stable and effective in environments characterized by exposure to aggressive chemicals and corrosive agents. The coating’s impermeability to gases and liquids further safeguards the substrate, preventing infiltration that could otherwise compromise its performance. This characteristic makes the Glass-like Carbon Coated Rigid Felt particularly valuable in semiconductor manufacturing, where exposure to harsh chemical processes is common.

High purity is another critical benefit offered by the glass-like carbon coating. With achievable purity levels reaching 99.99999%, the coating minimizes particle generation, a vital consideration in semiconductor cleanroom environments. Reduced particle emission helps prevent contamination, thus enhancing the reliability and yield of semiconductor devices. This purity, combined with the material’s isotropic structure, which ensures uniform properties in all directions, contributes to the Glass-like Carbon Coated Rigid Felt's consistent performance across a range of applications.

The electrical and thermal conductivity of the glass-like carbon coating further enhances the versatility of the rigid felt. These conductive properties enable efficient heat and electrical current management, supporting applications such as heaters and other thermal processing equipment. By facilitating effective thermal and electrical performance, the Glass-like Carbon Coated Rigid Felt becomes an indispensable asset in complex semiconductor systems where precision is paramount.

In the semiconductor industry, the applications of Glass-like Carbon Coated Rigid Felt are extensive and varied. It is an ideal material for components in plasma etching and chemical vapor deposition (CVD) tools, where its chemical resistance and thermal capabilities are critical. Additionally, the material serves as an effective sputtering target and sample holder for analytical equipment, where its high purity and stability ensure accurate outcomes. This versatility extends to its use in jigs for glass manufacturing processes, leveraging its heat resistance and impermeability to optimize performance in shaping and forming glass materials.

Beyond the semiconductor realm, the benefits of Glass-like Carbon Coating have implications for other high-tech applications. Its heat resistance and chemical inertness make it suitable for use in heaters and thermal analysis equipment, where precise control over temperature and chemical interactions is required. The material’s ability to maintain performance under extreme conditions ensures that it remains a reliable component in a wide range of demanding industrial applications.

SEM Image of Porous Glass-like carbon