AlN Heater

Versatility in Operating Environments

One of the foremost attributes of the AlN Heater is its ability to perform efficiently in diverse operating environments, including both atmospheric and vacuum conditions. With an impressive operational temperature range extending up to 1000°C (1832°F), it ensures rapid and uniform heating across the board. This versatility makes it suitable for a multitude of applications, ranging from semiconductor manufacturing devices to vacuum evaporation systems, sputtering machines, and chemical vapor deposition (CVD) devices.

Precision Engineering with Sintering Process

The manufacturing process of the AlN Heater involves vacuum hot pressing, a significantly more challenging process than conventional pressureless sintering. This sophisticated technique ensures the heater’s aluminum nitride purity reaches an outstanding 99.5%. By employing such rigorous manufacturing standards, Semicorex guarantees that each AlN Heater exhibits exceptional mechanical and thermal properties, providing reliable performance even under the most demanding conditions.

Exceptional Thermal Conductivity

A standout feature of the AlN Heater is its high thermal conductivity, which exceeds 180 W/m*K. This high thermal conductivity is instrumental in achieving excellent thermal uniformity over a wide temperature range, a critical factor for many high-precision applications. The heater can be engineered with a multilayer construction capable of delivering up to 2000 W/in² (310 W/cm²), ensuring efficient and uniform heat distribution. This capability is especially valuable in semiconductor processing where precise temperature control is paramount.

Superior Corrosion Resistance

In addition to its thermal properties, the AlN Heater boasts superior corrosion resistance. It is highly resilient against halogen gases and oxidizing environments, and it also demonstrates robust resistance to most acidic and alkaline solutions. This resistance ensures long-term durability and operational stability, even in environments where exposure to corrosive substances is a constant concern. Such durability reduces the need for frequent replacements, thereby lowering maintenance costs and enhancing overall system reliability.

Applications Across High-Tech Industries

The AlN Heater by Semicorex is indispensable in various high-tech industries due to its advanced attributes:

Semiconductor Manufacturing: The heater’s uniform heating and precise control make it ideal for use in semiconductor processing equipment, ensuring high-quality wafer production.

Vacuum Evaporation Systems: Its ability to operate in vacuum environments at high temperatures makes it an excellent choice for vacuum evaporation systems, where controlled heating is crucial.

Sputtering Machines: The AlN Heater’s thermal conductivity and corrosion resistance enhance the efficiency and lifespan of sputtering machines, which are used for coating substrates.

Chemical Vapor Deposition (CVD) Devices: In CVD processes, where materials are deposited onto substrates through chemical reactions, the heater’s uniform temperature distribution ensures consistent and high-quality thin films.

Enhanced Performance and Reliability

The AlN Heater’s design and material composition contribute to its enhanced performance and reliability. The purity of the aluminum nitride, combined with the rigorous sintering process, results in a heater that not only performs exceptionally well but also maintains its integrity over extended periods. This reliability is crucial in high-stakes environments where equipment failure can lead to significant downtime and financial losses.

Customizable Design

Understanding that different applications have unique requirements, Semicorex offers customizable design options for the AlN Heater. Whether it’s adjusting the heater’s size, shape, or power output, our team of experts works closely with clients to develop tailored solutions that meet specific needs. This level of customization ensures that the AlN Heater integrates seamlessly into existing systems, enhancing overall efficiency and performance.