Semicorex provides N-type SiC ingot with 4 inches, 6 inches and 8 inches. We have been manufacturer and supplier of wafers for many years. Our 4" 6" 8" N-type SiC Ingot has a good price advantage and cover most of the European and American markets. We look forward to becoming your long-term partner in China.
4 Inch N-type SiC Ingot Specification |
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Items |
Production Grade |
Dummy Grade |
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Polytype |
4H |
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Dopant |
n-type Nitrogen |
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Resistivity |
0.015~0.025 ohm ·cm |
0.015~0.028 ohm ·cm |
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Diameter |
100.25±0.25 mm |
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Thickness |
≥15 mm |
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Surface orientation error |
4°toward<11-20>±0.2° |
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Primary flat orientation |
[1- 100]±5.0° |
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Primary flat length |
32.5±1.5 mm |
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Secondary flat |
90.0°CW from Primary ±5.0°, silicon face up |
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Secondary flat length |
18±1.5 mm |
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Micropipe density |
≤0.5 ea/cm2 |
≤10 ea/cm2 |
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BPD |
≤2000 ea/cm2 |
-- |
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TSD |
≤500 ea/cm2 |
-- |
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Edge Cracks |
≤3 ea,≤1mm/ea |
≤5 ea,≤3mm/ea |
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Polytype areas |
None |
≤5% area |
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Edge indents |
≤3 ea,≤1mm width and depth |
≤5 ea,≤2mm width and depth |
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Label |
C-face |
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Packaging |
unit-ingot cassette, vacuum packaging |
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6 Inch N-type SiC Ingot Specification |
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Items |
Production Grade |
Dummy Grade |
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Polytype |
4H |
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Dopant |
n-type Nitrogen |
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Resistivity |
0.015~0.025 |
0.015~0.028 |
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Diameter |
150.25±0.25 mm |
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Thickness |
≥15 mm |
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Surface orientation error |
4°toward<11-20>±0.2° |
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Primary flat orientation |
[1- 100]±5.0° |
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Primary flat length |
47.5±1.5 mm |
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Micropipe density |
≤0.5 ea/cm2 |
≤10 ea/cm2 |
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BPD |
≤2000 ea/cm2 |
-- |
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TSD |
≤500 ea/cm2 |
-- |
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Edge Cracks |
≤3 ea,≤1mm/ea |
≤5 ea,≤3mm/ea |
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Polytype areas |
None |
≤5% area |
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Edge indents |
≤3 ea,≤1mm width and depth |
≤5 ea,≤2mm width and depth |
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Label |
C-face |
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Packaging |
unit-ingot cassette, vacuum packaging |
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8 Inch N-type SiC Ingot Specification |
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Items |
Production Grade |
Research Grade |
Dummy Grade |
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Polytype |
4H |
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Dopant |
n-type Nitrogen |
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Resistivity |
0.015~0.028 |
0.01~0.04 |
NA |
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Diameter |
200.25±0.25 mm |
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Thickness |
NA |
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Surface orientation error |
4°toward<11-20>±0.5° |
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Notch orientation |
[1- 100]±5.0° |
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Notch depth |
1~1.5 mm |
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Micropipe density |
≤2 ea/cm2 |
≤10 ea/cm2 |
≤50 ea/cm2 |
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BPD |
≤2000 ea/cm2 |
≤500 ea/cm2 |
-- |
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TSD |
≤500 ea/cm2 |
≤1000 ea/cm2 |
-- |
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Edge Cracks |
≤3 ea,≤1mm/ea |
≤4 ea,≤2mm/ea |
≤5 ea,≤3mm/ea |
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Polytype areas |
None |
≤20% area |
≤30% area |
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Edge indents |
≤3 ea,≤1mm width and depth |
≤4 ea,≤2mm width and depth |
≤5 ea,≤2mm width and depth |
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Label |
C-face |
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Packaging |
unit-ingot cassette, vacuum packaging |