TaC coating graphite is created by coating the surface of a high-purity graphite substrate with a fine layer of tantalum carbide by a proprietary Chemical Vapor Deposition (CVD) process.
Tantalum carbide (TaC) is a compound that consists of tantalum and carbon. It has metallic electrical conductivity and an exceptionally high melting point, making it a refractory ceramic material known for its strength, hardness, and heat and wear resistance. The melting point of Tantalum Carbides peaks at about 3880°C depending on purity and has one of the highest melting points among the binary compounds. This makes it an attractive alternative when higher temperature demands exceed performance capabilities used in compound semiconductors epitaxial processes such as MOCVD and LPE.
Material data of Semicorex TaC Coating
Projects |
Parameters |
Density |
14.3 (gm/cm³) |
Emissivity |
0.3 |
CTE (×10-6/K) |
6.3 |
Hardness (HK) |
2000 |
Resistance (Ohm-cm) |
1×10-5 |
Thermal Stability |
<2500℃ |
Graphite Dimension Change |
-10~-20um (reference value) |
Coating Thickness |
≥20um typical value(35um±10um) |
|
|
The above are typical values |
|
Semicorex TaC Coating Half-moon is a specialized component crafted from tantalum carbide (TaC) coated graphite, designed for use in epitaxial processes. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.
Read MoreSend InquirySemicorex TaC Coating Chuck, the cutting-edge vacuum chuck equipped with TaC coatings, specifically designed for semiconductor furnaces. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.
Read MoreSend InquiryYou can rest assured to buy TaC Coating Epitaxial Plate from our factory. Semicorex TaC (Tantalum Carbide) coating epitaxial plate boasts exceptional heat resistance, making it ideal for applications subjected to high temperatures. Its remarkable ability to withstand heat ensures durability and reliability in demanding environments. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.
Read MoreSend InquirySemicorex TaC Coated Plate is a specialized disc designed for use in SiC epitaxial processes, crafted with precision from high-quality graphite material. Its surface is meticulously coated with tantalum carbide (TaC), a compound known for its exceptional purity and strength. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.
Read MoreSend InquirySemicorex TaC Coating Jig stands as a pivotal component within the semiconductor manufacturing process, crafted meticulously from graphite and fortified with a resilient layer of tantalum carbide coating. This crucial equipment element embodies a fusion of cutting-edge materials science and precision engineering, designed to uphold stringent operational demands and exacting standards prevalent in semiconductor fabrication. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.
Read MoreSend InquirySemicorex TaC Coating Susceptor represents a pinnacle in material engineering, meticulously crafted from high-quality graphite and fortified with a tantalum carbide coating. Primarily engineered for employment within SiC crystal growth and SiC epitaxial processes, this innovative component stands as a beacon of durability and performance in extreme thermal and chemical environments. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.
Read MoreSend Inquiry