Semicorex RTP carrier is silicon carbide coated using the chemical vapor deposition(CVD) process, which is really stable for RTA, RTP or harsh chemical cleaning. At the core of the semiconductor process, the epitaxy susceptors, are first subjected to the deposition environment, so it has high heat and corrosion resistance. The SiC coated carrier also has a high thermal conductivity, and excellent heat distribution properties.
● High purity SiC coated graphite
● Superior heat resistance and chemical resistance
● High thermal uniformity
● Excellent wear resistance
Semicorex RTP Carrier for MOCVD Epitaxial Growth is ideal for semiconductor wafer processing applications, including epitaxial growth and wafer handling processing. Carbon graphite susceptors and quartz crucibles are processed by MOCVD on the surface of graphite, ceramics, etc. Our products have a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.
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