Quartz 12” Boat

Engineered with precision and constructed from high-purity quartz, Semicorex Quartz 12” Boat provides an optimal solution for the delicate and critical task of wafer processing.

At the heart of semiconductor fabrication, the quality and reliability of equipment used can significantly impact the performance and yield of the final product. The Quartz 12” Boat excels in this regard, offering unparalleled thermal stability, chemical resistance, and mechanical strength. Its superior properties ensure that wafers are securely held and protected throughout various stages of processing, including high-temperature annealing, chemical vapor deposition (CVD), and oxidation.

One of the standout features of the Quartz 12” Boat is its exceptional thermal stability. Quartz is renowned for its ability to withstand extreme temperatures without deformation or degradation. This is particularly crucial during high-temperature processes where maintaining structural integrity is essential to prevent wafer contamination or breakage. The Quartz 12” Boat design takes full advantage of quartz’s thermal properties, ensuring uniform heat distribution and minimizing thermal stress on the wafers. This leads to a more consistent process and higher quality outcomes.

In addition to thermal stability, the Quartz 12” Boat exhibits excellent chemical resistance. During semiconductor fabrication, wafers are exposed to a variety of chemicals, including acids, alkalis, and reactive gases. The high-purity quartz material is inherently resistant to these corrosive substances, preventing any adverse reactions that could compromise the wafers. This chemical inertness ensures that the boat does not introduce any impurities, thereby maintaining the integrity and purity of the semiconductor devices being manufactured.