Water Pump Sic Seal Ring

Semicorex advanced, high-purity SiC Focus Rings are built to withstand the extreme environments in plasma etch (or dry etch) chambers. We focus on semiconductor industries such as silicon carbide layers and epitaxy semiconductor. Our products have a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

"Sincerity, Innovation, Rigorousness, and Efficiency" is the persistent conception of our company for the long-term to develop together with customers for mutual reciprocity and mutual benefit for Water Pump Sic Seal Ring, Adhering into the business enterprise philosophy of 'customer initial, forge ahead', we sincerely welcome purchasers from at your home and abroad to cooperate with us. Water Pump Sic Seal Ring, Pump Sic Seal Ring, Silicon Carbide Seal Rings, Our staffs are rich in experience and trained strictly, with professional knowledge, with energy and always respect their customers as the No. 1, and promise to do their best to provide the effective and individual service for customers. The Company pays attention to maintaining and developing the long-term cooperation relationship with the customers. We promise, as your ideal partner, we will develop a bright future and enjoy the satisfying fruit together with you, with persisting zeal, endless energy and forward spirit.

Semicorex supplies Water Pump Sic Seal Ring is really stable for RTA, RTP or harsh chemical cleaning. Water Pump Sic Seal Ring or edge rings are designed to improve etch uniformity around the wafer edge or perimeter. Minimize contamination and unscheduled maintenance with high-purity components engineered for the rigors of plasma etch processing. Our Water Pump Sic Seal Ring with SiC Coating is a dense, wear-resistant silicon carbide (SiC) coating. It has high corrosion and heat resistance properties as well as excellent thermal conductivity. We apply SiC in thin layers onto the graphite using the chemical vapor deposition (CVD) process.

Parameters of Water Pump Sic Seal Ring

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300

Features of Water Pump Sic Seal Ring

- CVD Silicon Carbide coatings to improve service life.

- Thermal insulation made of high-performance purified rigid carbon.

- Carbon/Carbon composite heater and plate. - Both the graphite substrate and silicon carbide layer have a high thermal conductivity, and excellent heat distribution properties.

- High-purity graphite and SiC coating for pinhole resistance and higher lifetime

Hot Tags: Water Pump Sic Seal Ring, Pump Sic Seal Ring, Silicon Carbide Seal Rings

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