Semicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated products in China. We provide custom furnace solutions. Our CVD and CVI Vacuum Furnace has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.
Semicorex Single Zone CVD Furnace System for Graphene / CVD Graphene Furnace System is a high-quality tool designed for chemical vapor deposition (CVD) processes. The reaction temperatures up to 2200°C. It is capable of depositing a wide range of materials, including silicon carbide, boron nitride, graphene, and more. The CVD furnace has a robust design and is made of high-quality materials, ensuring reliability and durability for long-term use. It has both horizontal and vertical structures.
Application: C/C composite brake disc, crucible, mold and etc.
Features of Semicorex Single Zone CVD Furnace System for Graphene / CVD Graphene Furnace System
1.Robust design made of high-quality materials for long-term use;
2.Precisely controlled gas delivery through the use of mass flow controllers and high-quality valves;
3.Equipped with safety features such as over-temperature protection and gas leak detection for safe and reliable operation;
4.Using multiple temperature control zones, great temperature uniformity;
5.Specially designed deposition chamber with good sealing effect and great anti-contamination performance;
6.Using multiple deposition channels with uniform gas flow, without deposition dead corners and perfect deposition surface;
7.It has treatment for the tar, solid dust, and organic gases during the deposition process
Optional Features:
•Furnace door: screw/hydraulic/manual elevation type;swing opening/parallel opening(large size
furnace door); manual tight/ auto lock-ring tight
• Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel
•Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/CFC
•Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite
• Process gas system: volume/mass flow-meter
• Thermocouple: K type/N type/C type/S type
Specifications of CVD Furnace |
|||||
Model |
Working Zone Size (W × H × L) mm |
Max. Temperature (°C) |
Temperature Uniformity (°C) |
Ultimate Vacuum (Pa) |
Pressure Increase Rate (Pa/h) |
LFH-6900-C |
600×600×900 |
1500 |
±7.5 |
1-100 |
0.67 |
LFH-10015-C |
1000×1000×1500 |
1500 |
±7.5 |
1-100 |
0.67 |
LFH-1220-C |
1200×1200×2000 |
1500 |
±10 |
1-100 |
0.67 |
LFH-1530-C |
1500×1500×3000 |
1500 |
±10 |
1-100 |
0.67 |
LFH-2535-C |
2500×2000×3500 |
1500 |
±10 |
1-100 |
0.67 |
LFV-D3050-C |
φ300×500 |
1500 |
±5 |
1-100 |
0.67 |
LFV-D6080-C |
φ600×800 |
1500 |
±7.5 |
1-100 |
0.67 |
LFV-D8120-C |
φ800×1200 |
1500 |
±7.5 |
1-100 |
0.67 |
LFV-D11-C |
φ1100×2000 |
1500 |
±10 |
1-100 |
0.67 |
LFV-D26-C |
φ2600×3200 |
1500 |
±10 |
1-100 |
0.67 |
*The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.