Semicorex provides wafer boats, pedestals, and custom wafer carriers for both vertical / column and horizontal configurations. We have been manufacturer and supplier of silicon carbide coating film for many years. Our SiC Wafer Boat has a good price advantage and cover most of the European and American markets. We look forward to becoming your long-term partner in China.
Introducing our high-quality Quartz Boat for Diffusion of Wafer Processing, designed to provide a reliable solution for wafer processing in various industries. These ceramic pedestals are manufactured using high-purity ceramics, which offer excellent resistance to thermal shock, abrasion, and chemical corrosion, making them ideal for harsh wafer processing environments.
Our Quartz Boat for Diffusion of Wafer Processings are also highly customizable, and we can work with you to create custom pedestals to meet your unique specifications. We take pride in our ability to deliver high-quality, reliable products that meet the demands of our customers. Our Ceramic Wafer Boats are made to last and offer a long service life, ensuring that you get the most value out of your investment.
Order now and experience the benefits of our high-quality Quartz Boat for Diffusion of Wafer Processing in your wafer processing operations.
Parameters of Quartz Boat for Diffusion of Wafer Processing
Technical Properties |
||||
Index |
Unit |
Value |
||
Material Name |
Reaction Sintered Silicon Carbide |
Pressureless Sintered Silicon Carbide |
Recrystallized Silicon Carbide |
|
Composition |
RBSiC |
SSiC |
R-SiC |
|
Bulk Density |
g/cm3 |
3 |
3.15 ± 0.03 |
2.60-2.70 |
Flexural Strength |
MPa (kpsi) |
338(49) |
380(55) |
80-90 (20°C) 90-100(1400°C) |
Compressive Strength |
MPa (kpsi) |
1120(158) |
3970(560) |
> 600 |
Hardness |
Knoop |
2700 |
2800 |
/ |
Breaking Tenacity |
MPa m1/2 |
4.5 |
4 |
/ |
Thermal Conductivity |
W/m.k |
95 |
120 |
23 |
Coefficient of Thermal Expansion |
10-6.1/°C |
5 |
4 |
4.7 |
Specific Heat |
Joule/g 0k |
0.8 |
0.67 |
/ |
Max temperature in air |
℃ |
1200 |
1500 |
1600 |
Elastic Modulus |
Gpa |
360 |
410 |
240 |
Features of Quartz Boat for Diffusion of Wafer Processing
- CVD Silicon Carbide coatings to improve service life.
- Thermal insulation made of high-performance purified rigid carbon.
- Have a high thermal conductivity, and excellent heat distribution properties.
- High-purity ceramic and SiC coating for pinhole resistance and higher lifetime