Industrial Silicon Carbide Cantilever Paddle Ceramic Sic Boat Holder SiC wafer carrier

Semicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated Graphite Susceptor in China. Semicorex graphite susceptor engineered specifically for epitaxy equipment with high heat and corrosion resistance in China. Our RTP RTA SiC Coated Carrier has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.

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Product Description

Adhering to your principle of "quality, assistance, performance and growth", we have now gained trusts and praises from domestic and international customer for Industrial Silicon Carbide Cantilever Paddle Ceramic Sic Boat Holder SiC wafer carrier, Hope we can create a more glorious future with you through our efforts in the future. Industrial Silicon Carbide Cantilever Paddle, Sic Boat Holder, Ceramic Beam, We focus on providing service for our clients as a key element in strengthening our long-term relationships. Our continual availability of high grade solutions in combination with our excellent pre-sale and after-sales service ensures strong competitiveness in an increasingly globalized market. We have been willing to cooperate with business friends from at home and abroad and create a great future together.

Semicorex supplies Industrial Silicon Carbide Cantilever Paddle Ceramic Sic Boat Holder SiC wafer carrier used to support wafers, which is really stable for RTA, RTP or harsh chemical cleaning. Industrial Silicon Carbide Cantilever Paddle Ceramic Sic Boat Holder SiC wafer carrier with high-purity silicon carbide (SiC) coated graphite construction provides superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance. Fine SiC crystal coating provides a clean, smooth surface, critical for handling since pristine wafers contact the susceptor at many points across their entire area.
At Semicorex, we focus on providing high-quality, cost-effective Industrial Silicon Carbide Cantilever Paddle Ceramic Sic Boat Holder SiC wafer carrier, we prioritize customer satisfaction and provide cost-effective solutions. We look forward to becoming your long-term partner, delivering high-quality products and exceptional customer service.

Parameters of Industrial Silicon Carbide Cantilever Paddle Ceramic Sic Boat Holder SiC wafer carrier

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300

Features of Industrial Silicon Carbide Cantilever Paddle Ceramic Sic Boat Holder SiC wafer carrier

- Both the graphite substrate and silicon carbide layer have good density and can play a good protective role in high temperature and corrosive working environments.
- Silicon carbide coated susceptor used for single crystal growth has a very high surface flatness.
- Reduce the difference in thermal expansion coefficient between the graphite substrate and silicon carbide layer, effectively improve the bonding strength to prevent cracking and delamination.
- Both the graphite substrate and silicon carbide layer have a high thermal conductivity, and excellent heat distribution properties.
- High melting point, high temperature oxidation resistance, corrosion resistance.

Hot Tags: Silicon Carbide Cantilever Paddle, Sic Boat Holder, Ceramic Beam

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