PBN Ceramic Disc

One of the most significant advantages of the PBN Ceramic Disc is its remarkably high purity. The purity of the gaseous materials used in the synthesis process (BCl3 + NH3 -> BN + HCl) far exceeds that of conventional boron nitride powders. Consequently, the PBN Ceramic Disc achieves a purity level of 99.99%, with total impurities amounting to less than 100 parts per million (ppm). This exceptional purity is crucial in semiconductor manufacturing, where even the slightest contamination can lead to defects in electronic components. By ensuring such high purity, the PBN Ceramic Disc minimizes the risk of contamination, thereby enhancing the reliability and performance of semiconductor devices.

The CVD process employed in the production of the PBN Ceramic Disc imparts it with an almost perfect layered structure. This unique structure facilitates anisotropic thermal conductivity, a property that is highly beneficial for components used in furnace and vacuum systems. Anisotropic thermal conductivity allows the PBN Ceramic Disc to effectively manage heat distribution, ensuring uniform temperature control across the surface of the disc. This capability is essential in semiconductor manufacturing processes that require precise thermal management to prevent thermal gradients that could lead to component failures or inefficiencies.

In terms of thermal resilience, the PBN Ceramic Disc stands out as an exemplary material. It can withstand temperatures up to 1800°C in vacuum environments and 2000°C in nitrogen, without exhibiting a melting point. This extraordinary thermal stability makes it an ideal choice for furnace components and melting vessels, where extreme temperatures are a routine part of operation. The ability to maintain structural integrity at such high temperatures ensures longevity and reliability, reducing the need for frequent replacements and thus lowering overall operational costs.

Chemical inertness is another hallmark of the PBN Ceramic Disc. It is resistant to reactions with a wide range of substances, including acids, alkalis, organic solvents, molten metals, and graphite. This inertness is particularly advantageous in semiconductor manufacturing, where exposure to reactive substances is common. By remaining non-reactive, the PBN Ceramic Disc avoids unwanted chemical interactions that could compromise the integrity and functionality of semiconductor components.

The applications of the PBN Ceramic Disc in the semiconductor industry are diverse and impactful. Its properties make it an ideal material for use in various high-temperature and high-purity environments. In epitaxial growth processes, for instance, the disc serves as a crucial component in deposition systems, where its purity and thermal conductivity ensure the production of high-quality semiconductor layers. Additionally, in the fabrication of LEDs and other optoelectronic devices, the PBN Ceramic Disc provides a stable and reliable platform that supports the intricate processes required to achieve optimal device performance.

Moreover, the PBN Ceramic Disc’s role extends to the manufacturing of power electronic devices. These devices often operate at high temperatures and require materials that can maintain performance under such conditions. The PBN Ceramic Disc’s excellent thermal and chemical properties make it a suitable choice for substrates and other components within power electronic systems, contributing to the efficiency and durability of these devices.

Boron Nitride Structures