CVD SiC Coated Graphite Shower Head

In a plasma apparatus for etching and chemical vapor deposition (CVD) of materials on wafers, process gases are supplied into a process chamber through a CVD SiC coated graphite shower head. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

Send Inquiry

Product Description

Semicorex CVD SiC (Chemical Vapor Deposition Silicon Carbide) coated graphite shower head is a specialized component used in various industrial processes, such as chemical vapor deposition (CVD) and plasma-enhanced chemical vapor deposition (PECVD). It plays a crucial role in delivering precursor gases or reactive species onto a substrate's surface during these deposition processes.

The CVD SiC coated graphite shower head is made of high purity graphite and coated with a SiC thin layer by CVD method. CVD SiC coated graphite shower head combines the beneficial properties of graphite and SiC, making it an essential component in various deposition processes where precise and uniform gas distribution is required, along with resistance to high temperatures and chemical environments.

Features:

Chemical resistance

Thermal stability

Smooth and uniform surface

Reduced contamination