The significance of porous graphite materials to SiC crystal growth

Semicorex's SiC crystal growth furnace component, the porous graphite barrel, will bring three major benefits and can effectively strengthen the competitiveness of domestic SiC substrates:

• Reduce the cost of SiC crystal growth components;
• Increase the thickness of SiC crystal and reduce the overall cost of the substrate;
• Improve SiC crystal yield and enhance corporate competitiveness.

Adding porous graphite sheets to SiC crystal growth furnaces is one of the hot spots in the industry. It has been proven that by inserting a porous graphite sheets above the SiC source powder, good mass transfer in the crystal area is achieved, which can improve various technical problems existing in traditional crystal growth furnaces.

(a) Traditional crystal growth furnace, (b) Crystal growth furnace with porous graphite sheet

Source: Dongui University, South Korea

Experiments have shown that when using traditional crystal growth furnaces, SiC substrates usually have various polymorphs, such as 6H and 15R-SiC, while SiC substrates prepared using porous graphite-based crystal growth furnaces only have 4H-SiC monocrystal. Moreover, the microtube density (MPD) and etching pit density (EPD) are also significantly reduced. The MPD of the two crystal growth furnaces are 6-7EA/cm2 and 1-2EA/cm2 respectively, which can be reduced by up to 6 times.

Semicorex has also launched a new "one-time mass transfer" process based on porous graphite sheets. Porous graphite has very good purification ability. The new process uses a new thermal field for primary mass transfer, which makes the mass transfer efficiency improved and basically constant, thereby reducing the impact of recrystallization (avoiding secondary mass transfer), effectively reducing the risk of microtubules or Other associated crystal defects. In addition, porous graphite is also one of the core technologies to solve the problem of SiC crystal growth and thickness, because it can balance the gas phase components, isolate trace impurities, adjust local temperature, and reduce physical particles such as carbon wrapping. On the premise that the crystal can be used, the thickness of crystal can be reduced. can increase significantly.

Technical features of Semicorex porous graphite:

The porosity can reach up to 65%;

The pores are evenly distributed;

High batch stability;

High strength, can reach ≤1mm ultra-thin cylindrical shape.

Semicorex offers high-quality porous graphite parts. If you have any inquiries or need additional details, please don't hesitate to get in touch with us.

Contact phone # +86-13567891907

Email: sales@semicorex.com