Quartz Diffusion Tube

One of the primary advantages of the Quartz Diffusion Tube is the ability to prevent furnace atmosphere contamination during wafer production. Contaminants such as sodium, which can naturally occur in the silica sand used to produce fused quartz, can significantly impact the electrical properties of semiconductor devices. Semicorex Quartz Diffusion Tube is manufactured with an 99.998% silica content, ensuring exceptional purity and minimizing the risk of contamination. This high level of purity is crucial for maintaining the integrity of the wafer fabrication process and producing high-quality semiconductor devices.

The thermal properties of the Quartz Diffusion Tube is equally important in semiconductor manufacturing. Our Quartz Diffusion Tube can withstand temperatures up to 1250°C, making them suitable for the intense thermal conditions present in thermal oxidation and annealing processes. Thermal oxidation involves the growth of a silicon dioxide layer on the surface of silicon wafers, which serves as an insulator and is essential for the proper functioning of semiconductor devices. The high thermal resistance of Semicorex Quartz Diffusion Tube ensures that the oxidation process occurs uniformly and without interference from the tube material. This uniformity is vital for achieving consistent and reliable performance in the final semiconductor devices.

Annealing, another critical process in semiconductor wafer fabrication, involves heating and controlled cooling of wafers to modify physical and chemical properties. The process aims to improve the crystal structure of the silicon, activate dopants, and reduce defects. Semicorex Quartz Diffusion Tube provides the stability and thermal resistance necessary for effective annealing, ensuring that wafers are treated uniformly and achieve the desired material properties.

In addition to the high thermal resistance, Semicorex Quartz Diffusion Tube exhibits exceptional resistance to thermal shock. Semiconductor manufacturing processes often involve rapid temperature changes, which can induce thermal shock and potentially damage materials that are not designed to withstand such conditions. The high resistance to thermal shock of the Quartz Diffusion Tube ensures that it can cope with the rapid heating and cooling cycles typical in wafer fabrication. This durability helps maintain the integrity of the Quartz Diffusion Tube, ensuring their longevity and reliability in the production environment.

UV transparency is another significant benefit of Semicorex Quartz Diffusion Tube. In processes where UV light is used for inspection or activation purposes, the excellent UV transparency of our quartz tubes allows for better process control and monitoring. This transparency ensures that wafers are treated accurately and consistently, which is essential for achieving the desired electrical characteristics in the final semiconductor devices. The ability to monitor and control the process with precision enhances the overall quality and reliability of the semiconductor devices produced.

Semicorex understands that different semiconductor manufacturing processes have unique requirements. To meet these diverse needs, we offer custom-designed Quartz Diffusion Tube tailored to specific end-user applications. Our custom designs can include single or double-walled tubes, with or without attached plumbing, and various flange configurations. This flexibility allows us to provide solutions that are precisely aligned with the requirements of our customers’ fabrication processes. Our commitment to customization ensures that we can address the specific challenges and demands of each application, delivering the Quartz Diffusion Tube that enhances the efficiency and reliability of semiconductor manufacturing.

The capability to work with a wide range of tubing diameters is another advantage of Semicorex Quartz Diffusion Tube. We can produce quartz tubes with diameters up to 900mm and flanges slightly larger. This range of sizes ensures that we can provide the right quartz tube for any semiconductor manufacturing process, whether it involves small-scale research and development or large-scale production. Our ability to accommodate various sizes ensures that we can meet the specific needs of our customers and provide solutions that enhance their manufacturing processes.