Coating in the thermal field of semiconductor silicon single crystals

The coated parts in semiconductor silicon single crystal hot field are generally coated by CVD method, including pyrolytic carbon coating, Silicon Carbide coating and Tantalum Carbide coating, each with different characteristics.

Common points: the substrate are high-purity isostatic graphite, generally less than 5ppm ash; coating are used CVD method; coating is basically 100% carbon or Silicon Carbide; after coating the surface is relatively dense, the gas, especially the furnace silicon vapor or silicon oxide gas can basically be blocked; its own dust volatilization is also very little.

Differences: the standard thickness of the coating, pyrolytic carbon coating is generally about 40um; Silicon Carbide coating is generally done about 100um, but according to the different needs of customers, can be done 30um~150um, including one coating and two coatings; tantalum carbide coating is generally 35±15um.

Pyrolytic carbon coating, its density is equivalent to that of non-porous graphite, which is about 2.2. It has low resistivity and high thermal conductivity in the parallel direction of the surface, so it can keep the consistency of the surface temperature, and it also has a low coefficient of thermal expansion and a high modulus of elasticity. In the perpendicular direction of the surface, the coefficient of thermal expansion is larger and the thermal conductivity is lower.

For Silicon Carbide coated products, the elastic modulus of the coating is very high, tens of times higher than the elastic modulus of the internal graphite substrate, so in order to avoid product rupture, it needs to be handled gently.

Pyrolytic carbon coating and Silicon Carbide coating of all the impurity content is less than 5ppm, where the main metal element content is less than 0.1 or 0.01ppm, the more difficult to deal with the boron element is 0.01 or 0.15ppm.

Semicorex offers high-quality CVD coating product for semiconductor with customized service. If you have any inquiries or need additional details, please don't hesitate to get in touch with us.

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