Tantalum carbide coatings in semiconductor industry

The development of high-powered blue and UV LEDs has enabled the creation of full-color LED TV displays, as well as white LED automotive and domestic lighting. These LEDs are based on Gallium Nitride, which is deposited on substrate wafers supported by CVD SiC-coated graphite susceptor using the MOCVD process. However, the SiC coating is attacked by the ammonia gas used in the process, reducing its lifespan. To enhance coating lifespan and reduce overall cost, the industry is in need of a new, more inert coating option. Tantalum carbide is being considered as a replacement, as it can greatly enhance resistance to this aggressive atmosphere and provide a solution that is not currently available. Semicorex sells CVD TaC-coated graphite parts to suppliers in the semiconductor industry.

Our TaC-coated graphite products are known for their superior heat resistance when compared to SiC-coated graphite products. As a result, they are popularly used in semiconductor processing, such as epitaxial process of SiC wafers, which are used at higher temperatures. The demand for our products is increasing in line with market growth.

Semicorex offers high-quality TaC coated graphite parts with customized service. If you have any inquiries or need additional details, please don't hesitate to get in touch with us.

Contact phone # +86-13567891907

Email: sales@semicorex.com