TaC Coating

TaC ceramics have a melting point as high as 3880°C, high hardness (Mohs hardness 9-10), large thermal conductivity (22W·m^-1·K⁻¹), large flexural strength (340-400MPa), and small coefficient of thermal expansion (6.6×10^-6K-1), and exhibit excellent thermochemical stability and excellent physical properties, so TaC coatings are widely used in aerospace thermal protection, and graphite and C/C composites have good chemical compatibility and mechanical compatibility. ), and show excellent thermochemical stability and excellent physical properties, and graphite and C/C composites have good chemical compatibility and mechanical compatibility, so TaC coatings are widely used in aerospace thermal protection, single crystal growth, energy and electronics, and medical devices, etc. TaC-coated graphite has a better chemical resistance than bare graphite or SiC-coated graphite, and can be used stably at a high temperature of 2600°. 2600 ° high temperature stability, and many metal elements do not react, is the third generation of semiconductor single crystal growth and wafer etching scenarios in the best performance of the coating, can significantly improve the process of temperature and impurity control, the preparation of high-quality silicon carbide wafers and related epitaxial wafer. It is especially suitable for MOCVD equipment to grow GaN or AlN single crystals and PVT equipment to grow SiC single crystals, and the quality of the grown single crystals is significantly improved.

According to the research results, TaC coating can act as a protection and isolation layer to extend graphite component life, improve radial temperature uniformity, maintain SiC sublimation stoichiometry, suppress impurity migration, and reduce energy consumption. Ultimately a TaC-coated graphite crucible set is expected to improve SiC PVT process control and product quality.