China TaC Coating Manufacturers, Suppliers, Factory

TaC coating graphite is created by coating the surface of a high-purity graphite substrate with a fine layer of tantalum carbide by a proprietary Chemical Vapor Deposition (CVD) process.

Tantalum carbide (TaC) is a compound that consists of tantalum and carbon. It has metallic electrical conductivity and an exceptionally high melting point, making it a refractory ceramic material known for its strength, hardness, and heat and wear resistance. The melting point of Tantalum Carbides peaks at about 3880°C depending on purity and has one of the highest melting points among the binary compounds. This makes it an attractive alternative when higher temperature demands exceed performance capabilities used in compound semiconductors epitaxial processes such as MOCVD and LPE.

Material data of Semicorex TaC Coating

Projects	Parameters
Density	14.3 (gm/cm³)
Emissivity	0.3
CTE (×10^-6/K)	6.3
Hardness (HK)	2000
Resistance (Ohm-cm)	1×10^-5
Thermal Stability	<2500℃
Graphite Dimension Change	-10~-20um (reference value)
Coating Thickness	≥20um typical value(35um±10um)

The above are typical values

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TaC Coating Pedestal Supporter

Semicorex TaC Coating Pedestal Supporter is a critical component designed for epitaxial growth systems, specifically tailored for supporting reactor pedestals and optimizing process gas flow distribution. Semicorex delivers a high-performance, precision-engineered solution that combines superior structural integrity, thermal stability, and chemical resistance—ensuring consistent, reliable performance in advanced epitaxy applications.*

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CVD TaC Coated Susceptor

Semicorex CVD TaC Coated Susceptor is a premium solution designed for MOCVD epitaxial processes, providing outstanding thermal stability, purity, and corrosion resistance under extreme process conditions. Semicorex focuses in precision-engineered coating technology that ensures consistent wafer quality, extended component lifetime, and reliable performance in every production cycle.*

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TaC Coated Crucibles

Semicorex TaC Coated Crucibles are high-performance container designed for extreme temperature applications, suitable for both metal melting and advanced semiconductor processes. Choosing Semicorex means gaining access to cutting-edge coating technology and engineering expertise that deliver exceptional purity, durability, and stability in the most demanding environments.*

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TaC Coated Planetary Plate

Semicorex TaC Coated Planetary Plate is a high-precision component designed for MOCVD epitaxial growth, featuring planetary motion with multiple wafer pockets and optimized gas flow control. Choosing Semicorex means accessing advanced coating technology and engineering expertise that deliver exceptional durability, purity, and process stability for the semiconductor industry.*

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CVD TaC Coated Rings

Semicorex CVD TaC Coated Rings are high-performance flow guide components used in crystal growth furnaces to ensure precise gas control and thermal stability. Semicorex offers unmatched quality, engineering expertise, and proven performance in the most demanding semiconductor environments.*

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Guide Ring

Semicorex Guide Ring with CVD tantalum carbide coating is a highly reliable and advanced component for SiC single crystal growth furnaces. Its superior material properties, durability, and precision-engineered design make it an essential part of the crystal growth process. By choosing our high-quality Guide Ring, manufacturers can achieve enhanced process stability, higher yield rates, and superior SiC crystal quality.*

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Semicorex has been producing TaC Coating for many years and is one of the professional TaC Coating manufacturers and Suppliers in China. Once you buy our advanced and durable products which supply bulk packing, we guarantee the large quantity in quick delivery. Over the years, we have provided customers with customized service. Customers are satisfied with our products and excellent service. We sincerely look forward to becoming your reliable long-term business partner! Welcome to buy products from our factory.